000			02159nas a22003495i 4500
001			2520-8128
003			DE-He213
005			20260610082522.0
007			cr nn 008mamaa
008			170524s||||||||si uu poo|||||| b|EN |d
022			_a2520-8128
024	7		_a41871 _2local
210	1	0	_aNanomanuf Metrol
245	1	0	_aNanomanufacturing and Metrology _h[electronic resource] / _cedited by Fengzhou Fang, Wei Gao, Jingjing He.
264		1	_aSingapore : _bSpringer Nature Singapore : _bImprint: Springer.
300			_bonline resource.
520			_aNanomanufacturing and Metrology is a peer-reviewed, international and interdisciplinary research journal and is the first journal over the world that provides a principal forum for nano-manufacturing and nano-metrology. Nanomanufacturing and Metrology publish in the form of original articles, cutting-edge communications, timely review papers, technical reports, and case studies. Special issues devoted to developments in important topics in nano-manufacturing and metrology will be published periodically. Nanomanufacturing and Metrology publishes articles that focus on, but are not limited to, the following areas: Nano-manufacturing and metrology Atomic manufacturing and metrology Micro-manufacturing and metrology Physics, chemistry, and materials in micro-manufacturing, nano-manufacturing, and atomic manufacturing Tools and processes for micro-manufacturing, nano-manufacturing and atomic manufacturing.
650		0	_aMicrotechnology.
650		0	_aMicroelectromechanical systems.
650		0	_aNanotechnology.
650		0	_aManufactures.
650	1	4	_aMicrosystems and MEMS.
650	2	4	_aNanotechnology.
650	2	4	_aMachines, Tools, Processes.
700	1		_aFang, Fengzhou. _eeditor. _4edt _4http://id.loc.gov/vocabulary/relators/edt
700	1		_aGao, Wei. _eeditor. _4edt _4http://id.loc.gov/vocabulary/relators/edt
700	1		_aHe, Jingjing. _eeditor. _4edt _4http://id.loc.gov/vocabulary/relators/edt
710	2		_aSpringerLink (Online service)
776	0	8	_iPrinted version: _x2520-811X
856	4	0	_uhttp://link.springer.com/journal/41871 _zOpen Access
999			_c3692 _d3692